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Graphite Materials & Systems (GMS)
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Graphite Specialties supplies a wide range of components made of high purity graphite, carbon fiber reinforced carbon (SIGRABOND ) and felt (SIGRATHERM ) for semiconductor technology, power generation and thermal and power management.
We have developed special grades for all applications mentioned
below in all required sizes and offer all types of graphite materials - isostatic
graphites, extruded and vibration molded graphites, CFC (SIGRABOND ),
insulation materials and coatings. All products can be supplied
in highest purity.
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Semiconductor Materials and Quartz
Electrodes and heating elements for manufacturing high purity quartz glass products
- Heaters and shields for manufacturing optical fibers
- Blanks and graphite electrodes for polycrystalline silicon deposition
- Components made of high purity graphite, carbon/carbon (SIGRABOND
),
soft and rigid felt (SIGRATHERM ) for crystal growing of silicon,
germanium and III/IV composites (e.g. susceptors, heaters, heat
shields, current connecting parts)
- Slicing beams made of carbon and graphite for cutting monocrystal rods
- Graphite boats for zone refining of semiconductor materials
- Graphite boats for reduction heating of germanium oxide
- Graphite and C/C crucibles and boats for melting high purity metals or semiconductor materials
High Grade Electronic Components
SiC-coated
barrel, pancake and single wafer susceptors for ASM, Gemini and LPE and
various other OEMs silicon epitaxy reactors
- Graphite boats for liquid phase epitaxy (LPE)
- SiC-coated graphite susceptors for various MOCVD processes
- Single wafer susceptors for various processes, e.g. rapid therm process
(RTP), low pressure chemical vapor deposition (LPCVD), etc.
- Electrodes, ion sources (arc chambers) and shields for ion implantation
- Electrodes (grids) for plasma etching
- Liners (crucibles) for electron beam evaporation (EBE)
- Brazing and glass to metal sealing jigs
Thermal Management
- Heat sinks for phone docking stations
Power Generation and Management
Graphite
melting containers, casting dies and CZ growing parts for the production
of solar grade silicon (CZ, Bridgeman and others)
- Anode material for rechargeable lithium-ion batteries
- Nozzles for high voltage switchgear
Please contact us for more information.
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