Silicon Carbide-Coated Graphite Susceptors for LED Chip Production

Graphite wafer carriers are essential for the fabrication of LEDs. Rotating susceptors or carriers move the substrate wafers during the extensive coating process in the MOCVD (Metal Organic Chemical Vapor Deposition) reactor.

The properties of the susceptor material greatly influence the quality of the coating, and, in turn, the chip reject rate.


  • Lowest wavelength deviation and higher chip yields
  • High thermal conductivity to reduce thermal stress and to increase wafer output
  • Tighter dimensional tolerances lead to higher product yield and lower costs
  • High-purity graphite and SiC coating for pinhole resistance and higher lifetime
  • Global sales and service network with 24/7 support
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