High precision
Our silicon carbide (SiC)-coated susceptors make the manufacture of highquality LED wafers more efficient, keeping wavelength deviation to a minimum. Many important factors contribute to this, including the very high purity and uniform thermal conductivity of our isostatic graphite and SiC coatings. We carefully select the graphite grades for our susceptors and carriers.
Highprecision machining and homogeneous coatings ensure that the wafer carrier pockets have a uniform profile with minimal flatness deviation. Our extensive quality controls help us to supply fully traceable products of consistently high quality.
Increasing chip yield, minimizing deviation
We are always enhancing our materials and components in close collaboration with manufacturers and operators of MOCVD units. Together, we want to increase chip yields in the production of LED wafers while minimizing wavelength deviation.
We also supply other graphite components for all currently used MOCVD reactors. We can apply SiC coating to nearly every component, even with those diameters exceeding 1 m (3').
We can also support you in the development, analysis and optimization of your products and processes in LED chip production with engineering and calculation.
Materials
Innovative specialty graphite solutions play a key role in the challenging processes of the semiconductor industry. With optimized plant components and high-performance materials, we are a partner of choice to leading original equipment manufacturers (OEMs) and semiconductor producers.
No matter what your specific requirements might be, we will identify the best solution from our comprehensive range of specialty graphites for MOCVD epitaxy as well as other applications in the semiconductor and LED industries:
