Susceptors and components made from SIGRAFINE® isostatic graphite for silicon and SiC epitaxy

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A wafer needs to pass through several steps before it is ready for use in electronic devices. One important process is silicon epitaxy, in which the wafers are carried on graphite susceptors. The properties and quality of the susceptors have a crucial effect on the quality of the wafer’s epitaxial layer.

High purity and certified compliance

Special advantages of our SiC-coated graphite susceptors include extremely high purity, homogenous coating and an excellent service life. They also have high chemical resistance and thermal stability properties.

We maintain very close tolerances when applying the SiC coating, using high-precision machining to ensure a uniform susceptor profile. We also produce materials with ideal electrical resistance properties for use in inductively heated systems. All finished components come with a purity and dimensional compliance certificate.

Barrel, Pancake and Single Wafer Susceptors

SGL Carbon supplies susceptors and graphite components for all current epitaxy reactors. Our portfolio includes barrel susceptors for applied and LPE units, pancake susceptors for LPE, CSD, and Gemini units, and single-wafer susceptors for applied and ASM units.

By combining strong partnerships with leading OEMs, materials expertise and manufacturing know-how, SGL offers the optimal design for your application.

Meander Heater made from SIGRAFINE Isostatic Graphite

Heaters, Support Crucibles, Heat Shields and Insulating Components

Our portfolio includes heaters, support crucibles, heat shields and insulating components for many single crystal-growing processes and materials.

We also supply susceptors for silicon epitaxy and MOCVD reactors. Known for our consistently high quality and individualized production, we offer application-specific finishing through cleaning, mechanical processing or coating.

All of our susceptors are made of high-strength isostatic graphite. Benefit from the high purity of our graphites – developed especially for challenging processes like epitaxy, crystal growing, ion implantation and plasma etching, as well as for the production of LED chips.

Our Product Finder for SIGRAFINE Fine-Grain Graphite can help you pre-select the appropriate graphite grades for your application.

Thanks to our exhaustive quality controls, we offer our customers top-quality products that are fully traceable. We are also continually developing our materials and products further in close collaboration with manufacturers and operators of epitaxy units.